This dataset contains raw data of AFM analysis from the publication “Cadmium-free electron transport layers for hydrothermally processed semitransparent Sb2S3 solar cells”, published in Nano Energy, Volume 134, 2025, 110539, ISSN 2211-3282, https://doi.org/10.1016/j.nanoen.2024.110539. The data was collected at Luleå University of Technology (Luleå, Sweden). All data are provided under CC0 license. The dataset includes atomic force microscopy data (.mdt format). Dzmitry Kharytonau gratefully acknowledges the financial support of the internship at Luleå University of Technology and AFM measurements by the National Science Centre (Poland) under research Grant Sonatina no. 2021/40/C/ST5/00266.